Principles of plasma discharges and materials processing
229,20 $

Principles of plasma discharges and materials processing

ALAN J. LICHTENBERG, MICHAE LIEBERMAN


Principles of plasma discharges and materials processing

ALAN J. LICHTENBERG, MICHAE LIEBERMAN

229,20 $ 229,20 $
Régulier: 229,20 $
Rabais: 0,00 $ (0%)
Livre numérique non disponible
Résumé
A Thorough Update of the Industry Classic on Principles of Plasma Processing

The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals.

The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters.

New and expanded topics include:
* Updated cross sections
* Diffusion and diffusion solutions
* Generalized Bohm criteria
* Expanded treatment of dc sheaths
* Langmuir probes in time-varying fields
* Electronegative discharges
* Pulsed power discharges
* Dual frequency discharges
* High-density rf sheaths and ion energy distributions
* Hysteresis and instabilities
* Helicon discharges
* Hollow cathode discharges
* Ionized physical vapor deposition
* Differential substrate charging

With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.

Détails
Titre
Principles of plasma discharges and materials processing
Prix
229,20 $
Sujet
Format Poche
Non
Langue
Français/French
Date de publication
2005-04-08
ISBN
9780471724247
Code Interne
2169723
Numéro de produit
2169723
Format numérique
pdf
Protection
Adobe DRM
Entrepôt Numérique
NUMILOG

Notre conseil

Avant de vous déplacer, nous vous recommandons de téléphoner au magasin pour vérifier le stock.

Ville: (Changer).

exemplaire(s)
Ce produit est actuellement non disponible en magasin.
Nous n'avons pas pu trouver une succursale pour le code postal donné. Veuillez en essayer un autre.